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E-NZH-620 6-Axis Parallel Kinematic Hexapod Stage
The E-NZH-620 is a high-precision 6-degree-of-freedom (6-DOF) parallel kinematic hexapod stage, engineered for ultra-precision multi-axis positioning and alignment tasks. Powered by permanent magnet synchronous motors, it delivers exceptional accuracy, repeatability, and stiffness in a compact, rigid design.
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E-LMS250GT-X (linear positioning stage) One-dimensional linear motor motion stage
The E-LMS250GT-X linear motor platform uses high-quality granite as the base, with high rigidity linear roller guide rail and iron core linear motor.
Machine, with excellent flatness, straightness and load capacity, is generally used as the basic module of large-scale mobile positioning equipment.
● Granite base, good rigidity and stability, high flatness.
● Linear guide rail with C-LUBE technology, up to 5 years of lubrication-free cycle.
●High-efficiency, non-contact motor, high speed and very high speed stability.
● Excellent extended stroke and load capacity.
● Fast delivery based on customer production requirements.
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VCM175-Z50 Ultra-High Precision Vertical Linear Motor Stage
The VCM175-Z50 is a vertical Z-axis linear motor stage driven by a voice coil motor (VCM), designed for ultra-precision vertical positioning applications. It delivers nanometer-level resolution, exceptional repeatability, and smooth, backlash-free motion, making it ideal for high-end industrial and metrology tasks.
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E-EABT-D255 Economical Direct-Drive Air Bearing Rotary stage
Featured Economical Air Bearing Rotary TableThe E-EABT-D255 is a high-value, cost-effective direct-drive air bearing rotary stage, engineered to deliver precision performance at an accessible price point. Combining frictionless air-bearing technology with a compact direct-drive motor, it eliminates mechanical backlash and wear, ensuring ultra-smooth rotation and exceptional stability for a wide range of industrial and metrology applications. -
E-EABT-D200 Economical Direct-Drive Air Bearing Rotary stage
Featured Economical Air Bearing Rotary TableThe E-EABT-D200 is a high-performance, cost-effective direct-drive air bearing rotary stage engineered for precision motion applications. Combining ultra-smooth, frictionless air-bearing technology with a robust direct-drive motor, it delivers exceptional accuracy, stability, and repeatability without the wear or backlash associated with traditional mechanical transmission systems. -
E-EABT-D150 Economical Direct-Drive Air Bearing Rotary stage
Featured Economical Air Bearing Rotary TableThe E-EABT-D150 is a high-performance, cost-effective direct-drive air bearing rotary stage engineered for precision motion applications. Combining ultra-smooth, frictionless air-bearing technology with a robust direct-drive motor, it delivers exceptional accuracy, stability, and repeatability without the wear or backlash associated with traditional mechanical transmission systems. -
E-NZH-630 ,high-precision 6-degree-of-freedom ( Hexapod Motion Platform6-DOF) hexapod motion platform
Product Highlights
The E-NZH-630 6-axis displacement stage is a high-precision motion solution designed for demanding industrial and scientific applications, combining exceptional positioning accuracy, multi-axis flexibility, and robust mechanical performance.-
Multi-Axis Motion Control
It offers comprehensive 6-degree-of-freedom (6-DOF) control, including linear (X/Y/Z) and rotational (θX/θY/θZ) movements. With travel ranges of ±50 mm (X/Y), ±25 mm (Z), ±15° (θX/θY), and ±30° (θZ), it delivers full spatial manipulation for complex alignment tasks.
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Ultra-High Precision & Repeatability
Built for precision-critical workflows, the stage features repeatability down to ±0.1 µm (Z-axis) and ±1.5 µrad (θX/θY), with minimum step resolutions as fine as 1 µm (linear) and 10 µrad (rotational). Low backlash (0.2 µm for Z-axis, 4–8 µrad for rotational axes) ensures consistent, drift-free positioning.
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Balanced Speed & Dynamic Performance
Powered by permanent magnet synchronous motors, the stage achieves a maximum linear speed of 60 mm/s (typical: 40 mm/s) and rotational speed up to 700 mrad/s (typical: 480 mrad/s), enabling efficient alignment cycles without sacrificing accuracy.
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Reliable Load & Holding Capability
It supports a maximum load of 10 kg (horizontal orientation) / 3 kg (any direction), with a power-off holding force of 15 N / 5 N to secure positions during power interruptions, ensuring safety in sensitive setups.
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Robust Construction & Versatile Operation
Constructed from stainless steel and aluminum, the stage offers durability and stability across a wide operating temperature range of -10°C to +50°C. Its compact 12 kg design makes it suitable for integration into various systems without excessive footprint.
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E-NZH-610 ,high-precision 6-degree-of-freedom ( Hexapod Motion Platform6-DOF) hexapod motion platform
The E-NZH-610 is a compact, high-precision 6-degree-of-freedom (6-DOF) hexapod motion platform designed for multi-axis positioning and alignment applications. It delivers synchronized linear (X/Y/Z) and rotational (θX/θY/θZ) motion with sub-micron and sub-arc-second resolution, making it ideal for demanding precision tasks in optics, semiconductor manufacturing, metrology, and industrial automation.Built with a lightweight yet rigid stainless steel and aluminum structure, the SH-610 combines high stiffness with low mass (2.2 kg), enabling fast response and excellent dynamic performance in a compact footprint. -
E-EABT-D100 Air Bearing Rotary Table
EABT-D100 Economical Direct-Drive Air Bearing Rotary Table | Micron-Level Precision, High-Performance Without CompromiseBreak free from the limitations of traditional mechanical bearings. The EABT-D100 combines air bearing technology, a direct-drive motor, and high-resolution encoding to deliver ≤±2 sec repeatability and <0.8 µm runout in a compact package. With low air consumption and stable performance, it’s the cost-effective solution for optical inspection, semiconductor processing, and precision measurement.Short Taglines
- Frictionless air bearing + backlash-free direct drive: More stable accuracy, longer service life.
- 2000 rpm max speed + 1.5 Nm peak torque: Balances speed and load capacity.
- <0.8 µm runout + ±2 sec repeatability: Reliable precision for demanding applications.
- 8 NL/min low air consumption: Economical design, premium performance.
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USP-Mx Ultra-High Precision Air Bearing Rotary Stages
Ultra-High Precision & Unmatched Motion Stability
- Delivers industry-leading axial runout as low as 25nm and radial runout as low as 30nm across the series, with the largest M250/M200 models maintaining 25nm axial runout for ultra-smooth rotation.
- Achieves exceptional repeat positioning accuracy down to ±0.2 arcseconds (M200/M250), ensuring sub-micron level positioning consistency for the most demanding metrology and manufacturing applications.
- All runout and accuracy data is verified via lion standard ball + spindle error analyzer in a controlled laboratory environment, guaranteeing reliable, traceable performance.
- Axial runout and radial runout are measured in a laboratory environment using a Lion standard ball + spindle error analyzer.
- Load capacity is measured under 0.5 MPa gauge pressure.
- Stiffness is measured under central load with 0.5 MPa gauge pressure.
- Maximum speed can only be achieved with optional motor, grating ruler resolution, and corresponding driver support.
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μSCAN series of products Nano Scanning Stage μSCAN-1
μSCAN-1
The μSCAN series scanning system is a high-performance integrated system recently launched by our company. The whole machine uses high-rigidity granite as the base, cooperates with high-performance linear motors and servo platforms, and is mainly used for high-precision scanning, processing, testing and other applications. The selection of standard stroke parameters supports fast delivery, which greatly reduces the combination defects caused by the customer’s unfamiliarity with the combination and the performance shortcomings caused by the unfamiliarity with the debugging.
